METHOD AND APPARATUS FOR CONDITIONING PROCESS LIQUIDS

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United States of America Patent

APP PUB NO 20150202555A1
SERIAL NO

14158425

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus for conditioning a process liquid comprises a tank incorporating a heat transfer device for heating or cooling a process liquid in the tank. A filtration unit is mounted within the tank for filtering the process liquid in the tank. A pump is mounted adjacent the tank and in fluid communication with process liquid in the tank. The pump causes process liquid to circulate between the filtration unit and the heat transfer device.

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH AGSEZ STRASSE 1 VILLACH A-9500

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KOMETTER, Thomas Villach/Carinthia, AT 1 1

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