LOAD PORT APPARATUS
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United States of America Patent
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Issued Date -
Jul 9, 2015
app pub date -
Dec 29, 2014
filing date -
Jan 6, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
Provided is a load port apparatus capable of suppressing leakage of an inert gas from a mini-environment. The load port apparatus includes: a main base configured to partition the mini-environment from an external space, the main base including an opening portion facing an opening of a pod and communicating the mini-environment to the external space; and a door configured to open and close the opening portion and hold a lid. With this, wafers are insertable and removable between the pod and the mini-environment. The load port apparatus further includes a flexible sealing plate arranged so as to project from the main base toward an inside of the opening portion, the flexible sealing plate being configured to abut against an abutment surface surrounding the opening of the pod.
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