PHOTORESIST OVERCOAT COMPOSITIONS

United States of America Patent

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Issued Date
Jul 2, 2015
app pub date
Dec 31, 2014
filing date
Dec 31, 2013

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Abstract

Photoresist overcoat compositions comprise: a quenching polymer wherein the quenching polymer comprises: a first unit having a basic moiety; and a second unit formed from a monomer of the following general formula (I):

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Patent Owner(s)

Patent Owner	Address
ROHM AND HAAS ELECRONIC MATERIALS LLC	455 FOREST STREET MARLBOROUGH MA 01752

International Classification(s)

G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
ANDES, Cecily	Newton, US	11	87
LEE, Choong-Bong	Westborough, US	15	30
LEE, Christopher Nam	Austin, US	6	39
PARK, Jong Keun	Westborough, US	65	724

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PHOTORESIST OVERCOAT COMPOSITIONS

Number of patents in Portfolio can not be more than 2000

United States of America Patent

14588404

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14588404

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