METHOD FOR REGULATING THE TILTING OF A MIRROR ELEMENT
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United States of America Patent
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Jul 2, 2015
app pub date -
Mar 10, 2015
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Oct 5, 2012
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Abstract
An optical component comprises a carrying structure, at least one mirror element which is mounted in a tiltable manner relative to the carrying structure by an actuator system and which comprises at least one mirror electrode, at least one local regulating device for regulating the tilting of the mirror element, having at least one capacitive sensor and at least one actuator electrode for tilting the mirror element, and a signal generator for generating a modulation signal, having a frequency above a resonant frequency of the mirror element, wherein the signal generator is connected in a signal-transmitting manner to the at least one mirror electrode.
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