POLISHING END POINT DETECTION METHOD AND POLISHING END POINT DETECTION APPARATUS
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United States of America Patent
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Issued Date -
Jul 2, 2015
app pub date -
Dec 26, 2014
filing date -
Dec 27, 2013
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Abandoned
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Abstract
There is provided a polishing end point detection method of improving the accuracy of detecting a polishing end point. The polishing end point detection method emits light toward a polishing object including a hybrid film made of a nanocarbon material and a light-transmissive material while polishing the polishing object (Step S102). Then, the polishing end point detection method receives light reflected from the polishing object (Step S103). Then, the polishing end point detection method subjects the received reflected light to signal processing (Step S104). Then, the polishing end point detection method determines the polishing end point of the polishing object based on the result of the signal processing (Step S105), and detects the polishing end point (Step S106).
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