Non-volatile Memory Cell With Self Aligned Floating And Erase Gates, And Method Of Making Same

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United States of America Patent

SERIAL NO

14133821

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A memory device, and method of making the same, in which a trench is formed into a substrate of semiconductor material. The source region is formed under the trench, and the channel region between the source and drain regions includes a first portion that extends substantially along a sidewall of the trench and a second portion that extends substantially along the surface of the substrate. The floating gate is disposed in the trench, and is insulated from the channel region first portion for controlling its conductivity. The control gate is disposed over and insulated from the channel region second portion, for controlling its conductivity. The erase gate is disposed at least partially over and insulated from the floating gate. Any portion of the trench between the pair of floating gates is free of electrically conductive elements except for a lower portion of the erase gate.

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Patent Owner(s)

Patent OwnerAddress
SILICON STORAGE TECHNOLOGY450 HOLGER WAY SAN JOSE CA 95134

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Bomy Cupertino, US 90 1658
Do, Nhan Saratoga, US 220 1249
Su, Chien-Sheng Saratoga, US 46 662

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