Charged Particle Device
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United States of America Patent
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Issued Date -
Jun 25, 2015
app pub date -
Apr 22, 2013
filing date -
May 31, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A preferred aim of the present invention is to provide a charged particle beam device having a high differential exhaust performance while maintaining a large dynamic range of an irradiation current by effectively arranging an aperture for differential pumping (111) and an objective final aperture (110). The present invention has features that a lens barrel including therein an optical system of the charged particle beam device (100) includes a first space (106) having a first degree of vacuum and a second space (105) having a degree of vacuum higher than the first degree of vacuum, and that the objective final aperture (110) is arranged in the second space (105).
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