Surface Analysis Instrument
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United States of America Patent
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Issued Date -
Jun 18, 2015
app pub date -
Nov 24, 2014
filing date -
Nov 26, 2013
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Abstract
A surface analysis instrument is offered which can intelligibly display the results of a measurement. The surface analysis instrument (100) obtains a spectrum indicating a relationship between electron kinetic energy and detection intensity by irradiating a sample with an electron beam or X-rays and detecting electrons emanating from the sample. The instrument includes a detection depth calculating portion (76) for calculating the electron detection depth from the detected electron kinetic energy and a display controller (78) for providing control such that the spectrum and information about the electron detection depth calculated by the detection depth calculating portion (76) are displayed on a display device (82).
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