CARRIER SYSTEMS FOR INTRODUCING MATERIALS INTO MATERIAL PROCESSING SYSTEMS
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United States of America Patent
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Feb 27, 2015
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Jan 10, 2012
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Abstract
In various aspects and embodiment, the present disclosure relates to a carrier system for receiving and holding precursor material. The carrier system may be used within a material processing system for forming protecting coatings on a substrate. The carrier system may comprise a carrier including a plurality of receptacles. The carrier system may further include a plurality of cups, each cup configured to be removably positioned with a receptacle of the carrier.
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