Method for Synthesis of Uniform Bi-Layer and Few-Layer Hexagonal Boron Nitride Dielectric Films

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United States of America Patent

APP PUB NO 20150167148A1
SERIAL NO

14572928

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Abstract

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A method for forming high quality hexagonal boron-nitride films with multiple layers that are substantially parallel to the substrate and with substantially uniform layer thickness. In one embodiment, a bi-layer of boron-nitride is formed on a substrate by reactive radio frequency magnetron sputtering of a boron target in high-purity Ar/N2 gas mixtures at elevated temperature. In another embodiment, few-layer boron nitride films are formed by alternatingly reactive radio frequency magnetron sputtering of a boron target in high-purity Ar/N2 gas mixtures at room temperature and annealing at elevated temperature until a desired number of layers of high quality hexagonal boron nitride layers are formed on the substrate.

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Patent OwnerAddress
BROOKHAVEN SCIENCE ASSOCIATES LLC40 BROOKHAVEN AVE - P O BOX 5000 BLDG 460 UPTON NY 11973-5000

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  • 2014 Application Filing Year
  • C23C Class
  • 2649 Applications Filed
  • 2034 Patents Issued To-Date
  • 76.79 % Issued To-Date

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sutter, Eli Anguelova Westhampton Beach, US 11 143
Sutter, Peter Werner Westhampton Beach, US 11 143

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  • 6 Citation Count
  • C23C Class
  • 13.95 % this patent is cited more than
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