DEPOSITION OF NON-ISOSTRUCTURAL LAYERS FOR FLEXIBLE SUBSTRATE
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United States of America Patent
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Jun 11, 2015
app pub date -
Dec 5, 2014
filing date -
Dec 9, 2013
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Abstract
A plurality of non-isostructural layers are deposited onto a substrate. An inorganic layer is deposited onto the substrate by adsorbing metal atoms to the substrate. The inorganic layer on the substrate is exposed to a hydrocarbon-containing source precursor to deposit a first hydrocarbon-containing layer by adsorbing the hydrocarbon-containing source precursor onto the inorganic layer. The first hydrocarbon-containing layer on the substrate is exposed to a reactant precursor to increase reactivity of the first hydrocarbon-containing layer on the substrate, and a second hydrocarbon-containing layer is deposited onto the first hydrocarbon-containing layer on the substrate. The process may be repeated to deposit the plurality of layers. The second hydrocarbon-containing layer may have higher hydrocarbon content and may be deposited at a higher deposition rate than the first hydrocarbon-containing layer.
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