LIGHT-ASSISTED ACOUSTIC CLEANING TOOL

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United States of America Patent

APP PUB NO 20150158056A1
SERIAL NO

14098713

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A cleaning tool facilitating removal of particles from a surface is provided which includes an acoustic wave generator and one or more light-emitting diodes. The acoustic wave generator, which is configured to direct acoustic waves towards the surface to be cleaned, may include an acoustic transducer that facilitates generating the acoustic waves, and an acoustic coupler substrate through which the acoustic waves propagate. The light-emitting diode(s), which is configured to direct light towards the surface to be cleaned, is coupled to the acoustic coupler substrate of the acoustic wave generator. The acoustic wave generator and the light-emitting diode(s) are spaced from the surface to be cleaned, and are configured to selectively concurrently direct overlapping, at least partially, acoustic waves and light energy towards the surface to facilitate removal of particles by breaking bonds between the particles and the surface.

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Patent Owner(s)

Patent OwnerAddress
SEMATECH INC2706 MONTOPOLIS DRIVE AUSTIN TX 78741

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
RASTEGAR, Abbas Schenectady, US 20 137

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