Substrate spreading device for vacuum processing apparatus, vacuum processing apparatus with substrate spreading device and method for operating same
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United States of America Patent
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May 10, 2016
Grant Date -
Jun 11, 2015
app pub date -
Jan 21, 2014
filing date -
Dec 10, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
A processing apparatus for processing a flexible substrate, particularly a vacuum processing apparatus for processing a flexible substrate, is described. The processing apparatus includes a vacuum chamber; a processing drum within the vacuum chamber, wherein the processing drum is configured to rotate around an axis extending in a first direction; and a heating device adjacent to the processing drum, wherein the heating device is configured for spreading the substrate in the first direction or for maintaining a spread of the substrate in the first direction, and wherein the heating device has a dimension in a direction parallel to a substrate transport direction of at least 20 mm.
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International Classification(s)
- C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
- H01J:ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- B05C:APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MAT....
- B05D:PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MAT....
- B65G:TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR L....
- G11B:INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BET....
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