PROCEDURE AND ARRANGEMENT FOR TESTING THE OPERATIONAL STATE OF A PROCESS TOOL
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United States of America Patent
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Issued Date -
Jun 4, 2015
app pub date -
Dec 3, 2014
filing date -
Dec 3, 2013
priority date (Note) -
Abandoned
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Abstract
Methods and apparatus are disclosed for testing an operating state of a processing tool comprising an electrode with a transmitter having a sensor interface for connecting a sensor. A simulated sensor signal is output to the transmitter via the sensor interface, and the simulated sensor signal is converted into a measured value in the transmitter, where it is checked for correctness. The method does not require service personnel to be present on site, and after the sensor has been removed from the sensor interface, the simulated sensor signal is produced by an external electrode unit and is transmitted via the sensorless sensor interface to the transmitter.
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