DIELECTRIC WINDOW, ANTENNA AND PLASMA PROCESSING APPARATUS
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Jun 4, 2015
app pub date -
Dec 1, 2014
filing date -
Dec 3, 2013
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A slot plate is provided at one surface of a dielectric window. The other surface of the dielectric window includes a flat surface surrounded by an annular first recess, and a plurality of second recesses formed at a bottom surface of the first recess. An antenna including the dielectric window and the slot plate provided at one surface of the dielectric window can be applied to the plasma processing apparatus.
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