PROCESS MODULE
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United States of America Patent
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Issued Date -
Jun 4, 2015
app pub date -
Jan 17, 2013
filing date -
Feb 6, 2012
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Abstract
A process module includes at least one evacuable process chamber in the process module and at least one support device horizontally moveable through the process module in at least one substrate transport direction for respectively accommodating at least one flat substrate to be processed in the process chamber. The process module allows consistent and high-quality processing of all substrates at high production speed and at the lowest device costs possible. In the process module the at least one process chamber is physically closeable with respect to the process module by the support device, the position of which is changeable in at least one closing direction transverse to the substrate transport direction and the at least one support device forms a bottom of the at least one process chamber.
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