Optical axis adjustment method for X-ray analyzer and X-ray analyzer
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United States of America Patent
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Sep 13, 2016
Grant Date -
May 28, 2015
app pub date -
Nov 5, 2014
filing date -
Nov 25, 2013
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Abstract
An optical axis adjustment method for an X-ray analyzer. In a 2θ-adjustment step, a 0° position of the rotation of a receiving-side arm and a 0° position of the angle of diffraction 2θ are aligned. In a Zs-axis adjustment step, the position of an incident-side slit along a direction orthogonal to the centerline of the X-rays incident upon a sample from an X-ray source is adjusted. In a θ-adjustment step, the centerline of X-rays incident upon the sample from the X-ray source and the surface of the sample are adjusted so as to be parallel. In the 2θ-adjustment step, the Zs-axis adjustment step, and the θ-adjustment step, the capability for X-ray intensity positional resolution upon a straight line possessed by a one-dimensional X-ray detector is used to perform 2θ-adjustment, Zs-axis adjustment, and θ-adjustment.
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