FORMING RECESSED STRUCTURE WITH LIQUID-DEPOSITED SOLUTION
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United States of America Patent
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Issued Date -
May 28, 2015
app pub date -
Nov 22, 2013
filing date -
Nov 22, 2013
priority date (Note) -
Abandoned
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Abstract
A damascene approach is used to form a recessed structure in a substrate for receiving liquid-deposited solution, such as a carbon nanotube (CNT) solution. The liquid-deposited solution is built-up in the recessed structure, simplifying the coating process and providing a more uniform thickness of the liquid-deposited layer.
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