TARGET SUPPLY DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
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United States of America Patent
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N/A
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N/A
app pub date -
Feb 2, 2015
filing date -
Aug 8, 2012
priority date (Note) -
Abandoned
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Abstract
A target supply device may include: a tank including a storage portion that stores a target material and a supply portion that is in communication with the storage portion, the target material flowing into the supply portion; a nozzle including a nozzle hole that is in communication with the supply portion to be fed with the target material; and a coating portion that covers a wall surface of the nozzle hole.
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