ELECTROCHEMICALLY-ASSISTED MEGASONIC CLEANING SYSTEMS AND METHODS
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United States of America Patent
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Issued Date -
May 28, 2015
app pub date -
Nov 26, 2014
filing date -
Nov 27, 2013
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
An electrochemically-assisted megasonic cleaning method includes applying an electrical potential to a conductive surface immersed in solution to form bubbles of gaseous molecules produced by electrochemical reaction, and applying a megasonic field to the solution to oscillate the bubbles and clean the conductive surface without causing damage. An electrochemically-assisted megasonic cleaning system includes an electrical supply for applying electrical potential to a conductive surface immersed in solution to induce bubble formation in the solution and at the surface through an electrochemical reaction, and a transducer for applying a megasonic field to the solution to induce oscillation of the bubbles.
First Claim
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