CLUSTER-BATCH TYPE SYSTEM FOR PROCESSING SUBSTRATE
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United States of America Patent
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May 28, 2015
app pub date -
Nov 18, 2014
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Nov 25, 2013
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Abstract
Disclosed is a cluster-batch type substrate processing system. The cluster-batch type substrate processing system comprises a substrate carry-in section 1 into which a substrate 40 is carried; a substrate conveyance robot 7 to rotate about a rotation axis and perform loading/unloading of the substrate 40; and a plurality of batch type substrate processing apparatuses 9 (9a, 9b) disposed radially around the substrate conveyance robot 7.
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