Importance

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Abstract

The following method steps are known for producing cylindrical components from synthetic quartz glass containing fluorine: producing a SiO₂ soot body, removing hydroxyl groups from the soot body, loading the soot body with fluorine, post-chlorinating the soot body loaded with fluorine, and vitrifying the soot body to form the cylindrical component. In order to achieve distributions in particular of fluorine that are especially reproducibly homogeneous axially and radially, according to the invention it is proposed that a concentration of hydroxyl groups in the range of 1 to 300 weight ppm is set in the soot body upon the drying and an average fluorine content of at least 1500 weight ppm is set upon the loading with fluorine, and that loading with chlorine occurs during the post-chlorination, which loading results in an average chlorine content of at least 50 weight ppm in the synthetic quartz glass after the vitrification, under the further stipulation that the weight ratio of the contents of fluorine and chlorine is less than 30.

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First Claim