METHOD AND APPARATUS TO SUPPORT PROCESS TOOL MODULES IN PROCESSING TOOLS IN A CLEANSPACE FABRICATOR
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United States of America Patent
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Issued Date -
May 21, 2015
app pub date -
Jan 29, 2015
filing date -
Jun 18, 2005
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Abstract
The present invention provides various aspects of support for a processing tool in a fabrication facility capable of routine placement and replacement of processing tools and component assemblies of the tools. Support aspects include a support structure for component assemblies and a quick disconnect flange which facilitates connecting and disconnect of electrical, liquid and gas utilities to a tool component placed in the processing tool.
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