PRODUCTION OF GLANCING ANGLE DEPOSITED FILMS

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20150140213A1
SERIAL NO

14495608

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Abstract

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Method and apparatus for producing glancing angle deposited thin films. There is a source of collimated vapour flux, the source of collimated vapour flux having a deposition field; and a travelling substrate disposed within the deposition field of the source of collimated vapour flux, the collimated vapor flux being collimated at a defined non-zero angle to a normal to the travelling substrate.

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Patent Owner(s)

Patent OwnerAddress
THE GOVERNORS OF THE UNIVERSITY OF ALBERTAEDMONTON
MICRALYNE INC1911 - 94TH STREET EDMONTON ALBERTA T6N 1

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brett, Michael Julian Edmonton, CA 8 135
Hrudey, Peter Charles Philip Edmonton, CA 3 6
Taschuk, Michael Thomas Edmonton, CA 5 6
van, Popta Andy Christopher Edmonton, CA 3 25

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