OBJECTIVE LENS SWITCHING MECHANISM AND INSPECTION APPARATUS
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United States of America Patent
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Issued Date -
May 21, 2015
app pub date -
Nov 14, 2014
filing date -
Nov 19, 2013
priority date (Note) -
Abandoned
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Abstract
An objective lens switching mechanism holds a plurality of objective lenses respectively disposed on each of the plurality of lens mounts, moves the plurality of objective lenses between a first position on the lens mounts and a second position above the lens mounts by a rotating mechanism and moves the plurality of objective lenses from the second position above the lens mounts to another second position above the lens mounts.
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