MEMS PRESSURE SENSOR FIELD SHIELD LAYOUT FOR SURFACE CHARGE IMMUNITY IN OIL FILLED PACKAGING
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United States of America Patent
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May 21, 2015
app pub date -
Nov 18, 2013
filing date -
Nov 18, 2013
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Abstract
A pressure sensing element includes a sensing sub-element disposed on a diaphragm, the element including a shield disposed over the sub-element and configured to substantially eliminate influence of external charge on the sub-element during operation. A method of fabrication and a pressure sensor making use of the pressure sensing element are disclosed.
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