DEVICE AND METHOD FOR THE SURFACE TREATMENT OF A SUBSTRATE AND METHOD FOR PRODUCING AN OPTOELECTRONIC COMPONENT

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United States of America Patent

APP PUB NO 20150132872A1
SERIAL NO

14397207

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Abstract

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Various embodiments may relate to a device for the surface treatment of a substrate, including a processing head, which is mounted rotatably about an axis of rotation, and which comprises multiple gas outlets, which are at least partially implemented on a radial outer edge of the processing head.

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Patent Owner(s)

Patent OwnerAddress
FRAUNHOFER GESELLSCHAFT E V80686 MÜNCHEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bauer, Juergen Wielenbach, DE 53 300
Bauer, Klaus-Dieter Landau, DE 6 8
Doell, Gerhard Augsburg, DE 6 22
Erhard, Philipp Mering, DE 8 63
Vollkommer, Frank Gauting, DE 64 839

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