ADVANCED OFF-GAS RECOVERY PROCESS AND SYSTEM
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United States of America Patent
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Issued Date -
May 7, 2015
app pub date -
Apr 26, 2013
filing date -
Apr 27, 2012
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Abstract
A process that includes: (a) introducing a vent gas comprising hydrochloric acid, silicon tetrachloride, trichlorosilane, and dichlorosilane to an HCl converter reactor comprising a metal catalyst, to provide a product gas comprising less hydrochloric acid than was present in the vent gas; (b) refining the product gas to provide a hydrogen enriched stream and a chlorosilane(s) enriched stream, and (c) introducing the chlorosilane(s) enriched stream into a TCS/STC distillation unit, to generate a fraction enriched in silicon tetrachloride and another fraction enriched in trichlorosilane and dichlorosilane.
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