APPARATUS AND METHODS FOR IRRADIATING SUBSTRATES WITH ULTRAVIOLET LIGHT
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United States of America Patent
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Issued Date -
May 7, 2015
app pub date -
Nov 3, 2014
filing date -
Nov 4, 2013
priority date (Note) -
Abandoned
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Abstract
An apparatus for generating ultraviolet light for irradiating a substrate. The apparatus includes a housing enclosing an interior space. The housing includes an inlet for receiving a cooling air flow, and a window configured to emit ultraviolet light and discharge the cooling air flow. A lamp bulb is mounted within the interior space between the inlet and the window. First and second microwave generators are mounted between the inlet and the lamp bulb. A plate is positioned between the inlet and the first and second microwave generators, the plate at least partially defining a plenum within the housing and including first and second openings generally aligned with the respective first and second microwave generators to direct first and second portions of the cooling air flow at the first and second microwave generators.
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