SHAPE CALCULATION APPARATUS AND METHOD, MEASUREMENT APPARATUS, METHOD OF MANUFACTURING ARTICLE, STORAGE MEDIUM
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United States of America Patent
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Apr 30, 2015
app pub date -
Oct 29, 2014
filing date -
Oct 31, 2013
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Abstract
A shape calculation apparatus obtains measurement data of a first shape of a first partial region on a surface to be measured, and obtains measurement data of a second shape of a second partial region partially overlapping the first partial region on the surface to be measured. The apparatus determines a first shape correction parameter and a second correction parameter so that the value of an evaluation function for evaluating shape data obtained by correcting the measurement data of the first and second shapes by the first shape correction parameter and the second correction parameter falls within a tolerance range. The apparatus generates shape data of an entire region including the first and second partial regions by respectively correcting the measurement data of the first and second shapes using the first shape correction parameter and the second correction parameter, and combining the corrected shape data.
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