SULFUR AND SELENIUM PASSIVATION OF SEMICONDUCTORS

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United States of America Patent

APP PUB NO 20150118834A1
SERIAL NO

14524615

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Abstract

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The present invention includes methods directed to improved processes for producing a monolayer of sulfur or selenium on the surface of a semiconductor. As a surface layer, it functions to passivate the surface; if annealed, it provides a doping element.

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Patent Owner(s)

Patent OwnerAddress
SEMATECH INC2706 MONTOPOLIS DRIVE AUSTIN TX 78741

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
LOH, Wei-Yip Loudonville, US 56 246
TIECKELMANN, Robert Clifton Park, US 3 11

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