Method and Apparatus of Growing Metal-free and Low Stress Thick Film of Diamond-like Carbon
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Apr 16, 2015
app pub date -
Sep 19, 2014
filing date -
Oct 15, 2013
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Abstract
The presently claimed invention provides a metal-free and low stress thick film of diamond-like carbon (DLC). The diamond-like carbon layer of the present invention has a wide range of applications such as automotive coating, hydrophobic-hydrophilic tuning, solar photovoltaic, decorative coating, protective coating and bio-compatible coating. The presently claimed invention further provides a method and an apparatus to grow a metal-free and low stress thick film of diamond-like carbon by performing deposition and plasma etching to stack more than one diamond-like carbon layers together in the same chamber.
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