BONDABLE TOP METAL CONTACTS FOR GALLIUM NITRIDE POWER DEVICES

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United States of America Patent

SERIAL NO

14577875

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Abstract

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An embodiment of a semiconductor device includes a gallium nitride (GaN) substrate having a first surface and a second surface. The second surface is substantially opposite the first surface, at least one device layer is coupled to the first surface, and a backside metal is coupled to the second surface. A top metal stack is coupled to the at least one device layer. The top metal stack includes a contact metal coupled to a surface of the at least one device layer, a protection layer coupled to the contact metal, a diffusion barrier coupled to the protection layer, and a pad metal coupled to the diffusion barrier. The semiconductor device is configured to conduct electricity between the top metal stack and the backside metal.

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Patent Owner(s)

Patent OwnerAddress
NEXGEN POWER SYSTEMS INC2010 EL CAMINO REAL SANTA CLARA TOWN CENTRE # 1048 SANTA CLARA CA 95050

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Alvarez, Brian Joel San Jose, US 4 17
Disney, Donald R Cupertino, US 97 2097
Hyland, Patrick James Lazlo San Jose, US 4 21
Nie, Hui Cupertino, US 97 729

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