APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR CARRYING SUBSTRATE
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United States of America Patent
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Issued Date -
Apr 16, 2015
app pub date -
Oct 2, 2014
filing date -
Oct 10, 2013
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Abstract
Provided is an apparatus for treating a substrate. The apparatus for treating the substrate includes a carrying unit between a second chamber and a loadlock chamber. The carrying unit includes an arm, a blade for supporting the substrate, and a rotation driver for rotating the arm. The carrying unit disposed between the second chamber and the loadlock chamber receives the substrate transferred in the loadlock chamber to transfer the substrate onto a substrate supporter in the second chamber.
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