LOW-COST PLASMA REACTOR
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United States of America Patent
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Issued Date -
Apr 9, 2015
app pub date -
Oct 7, 2014
filing date -
Oct 7, 2013
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Abandoned
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Abstract
An apparatus for vacuum plasma processing materials in a vacuum chamber composed primarily of carbonaceous polymer. The various components of the vacuum chamber can be formed by traditional polymer assembly techniques. The polymers may be electrically non-conductive to allow external placement of electrodes for either capacitive coupling, inductive coupling, or both.
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