Tools and methods for forming semi-transparent patterning masks

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United States of America Patent

PATENT NO 10737433
APP PUB NO 20150099028A1
SERIAL NO

14490332

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Abstract

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Means, apparatus, systems, and/or methods are described for forming improved rigid or flexible semi-transparent imprinting templates. These templates can be used to produce patterning masks having improved resolution that do not require plasma etching for residue removal. The methods and apparatus are compatible with roll-to-roll manufacturing processes and enable roll-to-roll formation of a wide range of metal patterned films.

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Patent Owner(s)

Patent OwnerAddress
MICROCONTINUUM INC57 SMITH PLACE CAMBRIDGE MA 02138

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Slafer, W Dennis Arlington, US 37 501

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