METHOD FOR ENHANCING CONDUCTIVITY OF MOLYBDENUM THIN FILM BY USING ELECTRON BEAM IRRADIATION
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United States of America Patent
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Issued Date -
Apr 2, 2015
app pub date -
Dec 29, 2011
filing date -
Dec 15, 2011
priority date (Note) -
Abandoned
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Abstract
Disclosed is a method for manufacturing a solar cell, which is capable of enhancing the conductivity of a molybdenum thin film by decreasing the specific resistivity and thickness of the molybdenum thin film that is a back electrode. The method for manufacturing the solar cell according to the present invention includes: a step of forming a molybdenum thin film on a substrate; and a step of performing a post-processing process on the molybdenum thin film to form a back electrode. Here, the post-processing process with respect to the molybdenum thin film may be performed by irradiating an electron beam.
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