METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE, AND BLOCK COPOLYMER COMPOSITION
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United States of America Patent
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Apr 2, 2015
app pub date -
Sep 23, 2014
filing date -
Sep 27, 2013
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Abstract
A method of producing a structure containing a phase-separated structure, the method including: a step of forming a layer of a neutralization film; a step of form a layer containing a mixture of a plurality of block copolymers having different periods; and a step of phase-separating the layer containing the plurality of block copolymers.
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