METHOD FOR REPAIRING OPTICAL ELEMENTS, AND OPTICAL ELEMENT
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United States of America Patent
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Apr 2, 2015
app pub date -
Oct 21, 2014
filing date -
Apr 27, 2012
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Abstract
A method for repairing a collector for an EUV projection exposure apparatus having a first coating and a second coating, wherein the first coating is arranged between the second coating and a surface of the collector. The method includes completely or partly removing the first coating by treatment with a first chemical solution, and applying a new first coating.
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