Process, Film, and Apparatus for Top Cell for a PV Device

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United States of America Patent

APP PUB NO 20150087108A1
SERIAL NO

14498304

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This disclosure describes systems and methods for making at least a portion of a photovoltaic device. This may include a method of manufacturing, an optimization procedure and an apparatus for the PECVD (plasma enhanced chemical vapor deposition) of thin films over large area substrates. In particular, the system may be used to deposit thin film silicon material for photovoltaic (PV) applications. The photovoltaic device may be achieved by a combination of plasma chamber design (e.g., inter-electrode separation) and plasma process parameters (e.g., pressure, applied RF voltage, etc.) to optimize the doped and/or intrinsic layers of the solar cell (e.g., p-i-n junction).

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Patent Owner(s)

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TEL SOLAR AG9477 TRÜBBACH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kuegler, Eduard Klaus, AT 1 3
Prigent, Chloe Acigne, FR 1 3
Salabas, Aurel Gams, CH 3 6
Salabas, Elena Lorena Gams, CH 1 3

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