COOLER FOR PLASMA GENERATION CHAMBER OF EUV RADIATION SOURCE
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United States of America Patent
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Issued Date -
Mar 26, 2015
app pub date -
Sep 22, 2014
filing date -
Sep 24, 2013
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The disclosure provides a cooler for use in a plasma generation chamber of a radiation source for an extreme ultraviolet wavelength range. The cooler has a heat sink which is at least partially manufactured of a substrate material having a thermal conductivity of greater than 50 W/mK. A coolant duct is formed in the substrate material, and the coolant duct is configured to have a coolant flow therethrough. The cooler also includes a connection piece made of a metal or a metal alloy for connecting a coolant line to the coolant duct. The cooler further includes a connecting element for connecting the connection piece to the heat sink so that, when the connection piece is connected to the heat sink, a continuous line is formed by the coolant duct and the coolant line.
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