LASER-OPERATED LIGHT SOURCE

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20150083937A1
SERIAL NO

14490817

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A laser-operated light source encompasses a chamber for accommodating a gaseous medium for generating a plasma, which emits radiation in response to the operation of the light source under the impact of the laser radiation. The light source encompasses a housing for accommodating the chamber. The invention provides for optical filter means, which are assigned to the housing and/or which are arranged downstream from the housing in the light path of emitted radiation. The optical filter means serve to spectrally filter the radiation emitted by the plasma in response to the operation of the light source.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bischoff, Martin Bovenden, DE 23 112
Frerking, Dieter Gladebeck, DE 4 19
Nowitzki, Tobias Nordstemmen, DE 1 0
Spruch, Claus Gottingen, DE 4 19
Thöniß, Thomas Gottingen, DE 3 11

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