CONTACT APPARATUS
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United States of America Patent
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Issued Date -
Mar 26, 2015
app pub date -
Sep 17, 2014
filing date -
Sep 23, 2013
priority date (Note) -
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Abstract
A contact head unit provided in a contact apparatus may be provided with a contact rod, a housing, a thrust air passage, and a cancel air passage. The housing supports the contact rod linearly movably by a static pressure air bearing, which allows the contact rod to be brought into contact with an object. If a compressed air is supplied to the thrust air passage, a force in a direction of approaching the object acts on the contact rod. If the compressed air is supplied to the cancel air passage, a force in an opposite direction acts on the contact rod. A control unit sets applied pressure on the object by controlling the pressure of the compressed air of the thrust air passage and the pressure of the compressed air of the cancel air passage while the contact rod is in contact with the object.
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