METAL OXIDE ETCHING SOLUTION AND AN ETCHING METHOD
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United States of America Patent
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Mar 19, 2015
app pub date -
Sep 18, 2014
filing date -
Sep 18, 2013
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Abstract
The object of the present invention is to provide an etching solution composition for etching a metal oxide containing In and a metal oxide containing Zn and In used as a transparent electrode or an oxide semiconductor of an electronic device such as a semiconductor element or a flat panel display (FPD), the etching solution composition being controllable to give a practical etching rate, having high dissolving power toward Zn, and enabling a long solution life due to suppressed variation of the formulation during use. The object is solved by an etching solution composition that enables microfabrication to be carried out for a metal oxide containing In and a metal oxide containing Zn and In used as a transparent electrode or an oxide semiconductor of an electronic device such as a semiconductor element or an FPD, the composition containing water and at least one type of acid, excluding hydrohalic acids, perhalic acids, etc., having an acid dissociation constant pKan at 25° C. in any dissociation stage of no greater than 2.15, and the composition having a pH at 25° C. of no greater than 4, and an etching method using the etching solution composition.
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