ELECTROSTATIC LENSES AND SYSTEMS INCLUDING THE SAME
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
Mar 12, 2015
app pub date -
Nov 12, 2014
filing date -
Mar 4, 2011
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A system includes an electrostatic lens positioned in a path between a charged-particle source and a charged-particle detector. The electrostatic lens includes: a first electrode having a first aperture positioned in the path and aligned with a first axis; a second electrode positioned in the path between the first electrode and the charged-particle detector, the second electrode having a second aperture positioned in the path and aligned with a second axis, the second axis being parallel to the first axis and displaced from the first axis along a first direction; a third electrode positioned in the path between the first electrode and the second electrode; and a potential generator coupled to the first, second, and third electrodes. During operation, the potential generator applies a first potential to the first electrode, a second potential to the second electrode, and a third potential to the third electrode so that the electrostatic lens directs a beam of charged particles from the charged-particle source propagating along the first axis to propagate along the second axis.
First Claim
Other Claims data not available