Device and Method for Evacuating a Chamber and Purifying the Gas Extracted From Said Chamber
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United States of America Patent
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Mar 12, 2015
app pub date -
Dec 12, 2012
filing date -
Dec 14, 2011
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Abstract
A device evacuates a chamber and purifies the gas extracted from said chamber of any foreign substances. The device comprises a dry-condensing vacuum pump having an input connected to the chamber to be evacuated and is suitable for maintaining the input pressure at a constant level at the output despite variable conditions. An intermediate line which connects to the output of the dry-condensing vacuum pump and a liquid ring vacuum pump, the input of which is connected to the intermediate line, are additionally provided. A corresponding method makes it possible to purify the gas of any foreign substances reliably and effectively.
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