SYSTEM FOR FORMING MULTINARY NANOPARTICLE FILM AND METHOD FOR FORMING NANOPARTICLE FILM USING SAME
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United States of America Patent
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Issued Date -
Mar 5, 2015
app pub date -
Jan 31, 2013
filing date -
Mar 22, 2012
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Abstract
A multinary nanoparticle film forming system includes: a generating chamber with a plurality of metal materials arranged therein so as to generate multinary nanoparticles from nanoparticles; a film forming chamber with a substrate arranged therein; and granulation units arranged in the generating chamber so as to respectively correspond to the plurality of metal materials. Further, each of the granulation units includes each of containers respectively covering the metal materials, each of heaters respectively arranged in the containers, each of outflow ports respectively provided at the containers so as to enable the nanoparticles to flow out therefrom, and each of inflow ports respectively provided at the containers so as to enable the coolant gas to be respectively introduced into the containers.
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