PHYSICAL QUANTITY SENSOR
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United States of America Patent
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Issued Date -
Feb 19, 2015
app pub date -
Mar 26, 2013
filing date -
Mar 27, 2012
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Abstract
A physical quantity sensor 100 includes: first and second oscillators 1, 2 that are supported by a support member 9; first and second detection devices 4, 5 for detecting the oscillations of the first and second oscillators respectively; a sensor element 6 that is provided on the first or second oscillator and has characteristics capable of adsorbing and/or desorbing a measurement object; an elastic device 7 for coupling the first and second oscillators to each other; and a calculation device 8 for determining a frequency at which the vibrating device 3 vibrates the first oscillator. The calculation device determines the frequency so as to maximize the amplitude of the second oscillator, and calculates the mass or concentration of the measurement object on the basis of the ratio of the amplitude of the second oscillator to the amplitude of the first oscillator when the vibrating device vibrates the first oscillator.
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