DEVICE WITH A MICRO- OR NANOSCALE STRUCTURE
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United States of America Patent
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Issued Date -
Feb 19, 2015
app pub date -
Aug 5, 2014
filing date -
Aug 19, 2013
priority date (Note) -
Abandoned
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Abstract
A device with a micro- or nanoscale structure representing one or more of a mechanical structure, a sensing element, an active and/or passive electrical circuitry, comprises a component (1) containing the micro- or nanoscale structure (13), and a support (2) for the component (1). The support (2) contains a recess (23).
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