METHODS FOR MANUFACTURING POLISHING PAD AND POLISHING APPARATUS

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United States of America Patent

APP PUB NO 20150047266A1
SERIAL NO

14455074

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention relates to a method for manufacturing a polishing pad. The method of the invention includes the steps of (a) providing a releasing carrier; (b) providing a foaming resin composition; (c) coating the foaming resin composition of the step (b) on the carrier of the step (a); and (d) curing the foaming resin composition of the step (c). The invention also provides a process for manufacturing a polishing apparatus.

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Patent Owner(s)

Patent OwnerAddress
SAN FANG CHEMICAL INDUSTRY CO LTD402 FENGJEN RD JENWU DIST KAOHSIUNG CITY

International Classification(s)

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  • 2014 Application Filing Year
  • B24D Class
  • 286 Applications Filed
  • 220 Patents Issued To-Date
  • 76.93 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2014201520162017201820192020202120220255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
FENG, CHUNG-CHIH Kaohsiung City, TW 112 308
HUNG, YUNG-CHANG Kaohsiung City, TW 45 119
WU, WEN-CHIEH Kaohsiung City, TW 53 137
YAO, I-PENG Kaohsiung City, TW 79 189

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Patent Citation Ranking

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  • B24D Class
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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges19811764201 - 1011 - 2021 - 3031 - 4081 - 90051015202530354045505560657075808590

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